We have developed a silicon based miccroelectrode for simultaneous recording of cellular electrical activity and local drug delivery Fabrication scheme relies on the smart combination of Buried Channel Technology and Etching-Before-Grinding. Our micromachining concept provides injection, sampling and electrical recording — all integrated monolithically in a long and subsequently thinned silicon microelectrode. Feasibility of our microelectrode configuration has been demostrated in in vivo experiments.
Z. Fekete, Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding, Microsystem Technologies 21 (2015) 341-344
A. Pongrácz, Z. Fekete, G. Márton, Zs. Bérces, I. Ulbert, P. Fürjes, Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery, Sensors and Actuators B: Chemical 189 (2013) 97–105
Z. Fekete, A. Pongrácz, P. Fürjes, G. Battistig, Improved process flow for buried channel fabrication in silicon, Microsystem Technologies 18 (2012) 353-358